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Vista 300

Industry-leading automation

Vista 300 is the most advanced nano-chemical metrology instrument for R&D and failure analysis in nanofabrication.

AutoPiFM

AutoPiFM generates a complete dataset from scratch, including fixed-wavenumber PiFM images of every chemical component detected, and PiF‑IR spectra in each chemical phase. Sit back and let AutoPiFM do the work!

Automatic alignment

An industry first! The critical alignment of the excitation laser is now performed using computer vision, ensuring optimal results, reducing training, and saving time.

Compact footprint

Because of our automated beam alignment and integrated multiplexer, we can package the lasers below the main instrument. This creates a more compact design without compromises. Vista 300 supports up to two lasers to cover the full IR spectral range (see specifications).

Controlled environment

Maximize efficiency, minimize disruption

The 400 mm wide sample access door allows you to maximize throughput while minimizing thermal disturbances that can cause drift. The insulated metal enclosure ensures acoustic isolation and stable temperature control within 0.1 °C, while also being clean room compatible.

Specifications


Stage and scanner

Sample stage travel: 300 mm × 300 mm square.

Scan size: 90 µm × 90 µm.

Dual Z Feedback: 12 µm z-scanner with 600 nm fast-z scanner provides both high bandwidth and a large z-range


Functionality

Imaging modes: Non-contact AFM, PiFM, KPFM, cAFM, nano DMA, FvD (force vs distance) mapping.

Spectroscopy modes: PiF-IR, FvD.

PiF Laser Options: QCL (770 – 1840, 1995 – 2395 cm−1), OPO/DFG (590 – 2050, 2250 – 4400, 5000 – 7000 cm−1).

Depth probed (IR): 20 nm in surface mode & greater than 100 nm in bulk mode.


Physical requirements

System dimensions: Approximately 1.1 m × 1.1 m × 1.5 m (3’ 7.3” × 3’ 7.3”× 4’11”)

Enclosure: 400 mm × 200 mm access door minimizes thermal drift. The enclosure is removable without disconnecting cables.


Specifications


Stage and scanner

Sample stage travel: 300 mm × 300 mm square.

Scan size: 90 µm × 90 µm.

Dual Z Feedback: 12 µm z-scanner with 600 nm fast-z scanner provides both high bandwidth and a large z-range


Functionality

Imaging modes: Non-contact AFM, PiFM, KPFM, cAFM, nano DMA, FvD (force vs distance) mapping.

Spectroscopy modes: PiF-IR, FvD.

PiF Laser Options: QCL (770 – 1840, 1995 – 2395 cm−1), OPO/DFG (590 – 2050, 2250 – 4400, 5000 – 7000 cm−1).

Depth probed (IR): 20 nm in surface mode & greater than 100 nm in bulk mode.


Physical requirements

System dimensions: Approximately 1.1 m × 1.1 m × 1.5 m (3’ 7.3” × 3’ 7.3”× 4’11”)

Enclosure: 400 mm × 200 mm access door minimizes thermal drift. The enclosure is removable without disconnecting cables.


Don’t just see it. Identify it!