Vista 300
Industry-leading automation
Vista 300 is the most advanced nano-chemical metrology instrument for R&D and failure analysis in nanofabrication.
AutoPiFM
AutoPiFM generates a complete dataset from scratch, including fixed-wavenumber PiFM images of every chemical component detected, and PiF‑IR spectra in each chemical phase. Sit back and let AutoPiFM do the work!
Automatic alignment
An industry first! The critical alignment of the excitation laser is now performed using computer vision, ensuring optimal results, reducing training, and saving time.
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Compact footprint
Because of our automated beam alignment and integrated multiplexer, we can package the lasers below the main instrument. This creates a more compact design without compromises. Vista 300 supports up to two lasers to cover the full IR spectral range (see specifications).
Controlled environment
Maximize efficiency, minimize disruption
The 400 mm wide sample access door allows you to maximize throughput while minimizing thermal disturbances that can cause drift. The insulated metal enclosure ensures acoustic isolation and stable temperature control within 0.1 °C, while also being clean room compatible.
Specifications
Stage and scanner
Sample stage travel: 300 mm × 300 mm square.
Scan size: 90 µm × 90 µm.
Dual Z Feedback: 12 µm z-scanner with 600 nm fast-z scanner provides both high bandwidth and a large z-range
Functionality
Imaging modes: Non-contact AFM, PiFM, KPFM, cAFM, nano DMA, FvD (force vs distance) mapping.
Spectroscopy modes: PiF-IR, FvD.
PiF Laser Options: QCL (770 – 1840, 1995 – 2395 cm−1), OPO/DFG (590 – 2050, 2250 – 4400, 5000 – 7000 cm−1).
Depth probed (IR): 20 nm in surface mode & greater than 100 nm in bulk mode.
Physical requirements
System dimensions: Approximately 1.1 m × 1.1 m × 1.5 m (3’ 7.3” × 3’ 7.3”× 4’11”)
Enclosure: 400 mm × 200 mm access door minimizes thermal drift. The enclosure is removable without disconnecting cables.
Specifications
Stage and scanner
Sample stage travel: 300 mm × 300 mm square.
Scan size: 90 µm × 90 µm.
Dual Z Feedback: 12 µm z-scanner with 600 nm fast-z scanner provides both high bandwidth and a large z-range
Functionality
Imaging modes: Non-contact AFM, PiFM, KPFM, cAFM, nano DMA, FvD (force vs distance) mapping.
Spectroscopy modes: PiF-IR, FvD.
PiF Laser Options: QCL (770 – 1840, 1995 – 2395 cm−1), OPO/DFG (590 – 2050, 2250 – 4400, 5000 – 7000 cm−1).
Depth probed (IR): 20 nm in surface mode & greater than 100 nm in bulk mode.
Physical requirements
System dimensions: Approximately 1.1 m × 1.1 m × 1.5 m (3’ 7.3” × 3’ 7.3”× 4’11”)
Enclosure: 400 mm × 200 mm access door minimizes thermal drift. The enclosure is removable without disconnecting cables.