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PiFM Applications
Root Cause Analysis for Semiconductor Wafer Contamination: Identifying Sub-20 nm Organic and Inorganic Defects with PiFM
Key takeaways: Organic and Sub-20 nm Defects Challenge Root Cause Analysis Root cause analysis (RCA)…
Where Subtleties Matter: PiFM in Semiconductor Process Characterization
Advanced semiconductor devices rely on complex three-dimensional architectures composed of many layers of different materials,…
PiFM for Defect Review in Advanced Packaging Processes
Advanced packaging is a relatively recent innovation in semiconductor fabrication in which multiple devices (or dies) are bonded together prior to encapsulation.
Applying Photo Induced Force Microscopy (PiFM) for Automated Defect Review (ADR) in the Semiconductor Processes
PiFM introduction Photo-induced Force Microscopy (PiFM) is an advanced nanoscale characterization technique that integrates the…
Combining STEM and PiFM for Complementary Nanoscale Sample Analysis
Introduction Scanning Transmission Electron Microscopy (STEM) is a premier imaging and analytical technique that combines…
Unambiguous Nanoscale Characterization of Self Assembled Monolayer Coverage
Introduction Surface functionalization via SAM (self-assembled monolayer) coverage is utilized in a range of fields,…
Surface-Sensitive Characterization of ALD Films on Drug Particles: How PiFM Outperforms Conventional Techniques
Introduction Coating the surface of acetaminophen particles with Al₂O₃ and ZnO via atomic layer deposition…
Measurement of -OH termination on hydrophilic surfaces
Background For successful Cu-Cu hybrid bonding to occur in the most demanding advanced packaging, the…
Analyzing sub-20 nm defects and ultrathin (~1 nm thick) residues in semiconductor processes
Background With shrinking semiconductor device sizes and modern advanced packaging processes, it is crucial to…
Nanoscale Chemical and Morphological Characterization of Ultrathin Atomic Layer Deposition Films
Atomic-layer-deposition (ALD) of various oxides can be utilized for diverse applications in the semiconductor industry,…
Nano Chemical Characterization Uncovers Coating Issues for Monolayer Surface Functionalization
Background Modifying surfaces to influence subsequent molecular interactions is a powerful technique. By adding functional…
Reverse Engineer a Pre-cooked Rice Package
Background Multilayer films have been utilized in packaging food and drink for many years as…