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Semiconductor Applications
Analyzing sub-100 nm particulate defects and ultrathin (~1 nm thick) residues in semiconductor processes
Background For semiconductor processes, it is crucial to eliminate sub-100 nm particulate defects and surface…
Nanoscale Chemical and Morphological Characterization of Ultrathin Atomic Layer Deposition Films
Atomic-layer-deposition (ALD) of various oxides can be utilized for diverse applications in the semiconductor industry,…
Nano Chemical Characterization Uncovers Coating Issues for Monolayer Surface Functionalization
Background Modifying surfaces to influence subsequent molecular interactions is a powerful technique. By adding functional…
Atomic-level Processing
As integrated circuit devices continue to shrink, surface layers have become a significant fraction of…
Cross-sectional IR PiFM Analysis
Multi-layers of different materials find usage across various applications. The thicknesses of the layers range…
PiFM Imaging of Latent EUV in t-BOC CA Resist
On EUV exposure of t-BOC resists, topographic differences arise between exposed and unexposed masked areas.…
PiFM and Multimodal Imaging of HAMR Devices
Topography, PiFM, and s-SNOM (at one harmonic of the dither frequency) images are acquired concurrently…
Cross-section of Multilayer Stack
A multilayer stack grown on silicon is cross-sectioned (via cleaving) and imaged by PiFM. In…
ASD Area Selective Deposition Imaging with PiFM
PiFM works effectively with both organic and inorganic materials, as demonstrated in a sample analyzing…
Buried Silver Nanowires in Conductive Layer
Silver nanowires underneath the protective layer are not visible in AFM topography and phase images.…
Visualizing CMP by Dielectric Constant PiFM Imaging
A sample that has undergone chemical mechanical polishing (CMP) is imaged via PiFM. While metals…
Visualize Nanoscale Absorption in Perovskite Photovoltaic Film using Vis-PiFM
The chemical analysis of solar cell materials is an excellent application of Vis-PiFM. In a…