Vista-IR-S
While PiFM enjoys excellent traits such as ~5 nm spatial resolution and monolayer sensitivity on…
Semiconductor Applications
Surface Sensitivity of PiFM
Since photo-induced force (PiF) is generated from the tip-enhanced field, which extends only about 20…
Atomic-level Processing
As integrated circuit devices continue to shrink, surface layers have become a significant fraction of…
Cross-sectional IR PiFM Analysis
Multi-layers of different materials find usage across various applications. The thicknesses of the layers range…
PiFM Imaging of Latent EUV in t-BOC CA Resist
On EUV exposure of t-BOC resists, topographic differences arise between exposed and unexposed masked areas.…
PiFM and Multimodal Imaging of HAMR Devices
Topography, PiFM, and s-SNOM (at one harmonic of the dither frequency) images are acquired concurrently…
Cross-section of Multilayer Stack
A multilayer stack grown on silicon is cross-sectioned (via cleaving) and imaged by PiFM. In…
ASD Area Selective Deposition Imaging with PiFM
PiFM works well with both organic and inorganic materials. In ASD, organic self-assembled monolayers (SAMs)…
Buried Silver Nanowires in Conductive Layer
Silver nanowires underneath the protective layer are not visible in AFM topography and phase images.…
Visualizing CMP by Dielectric Constant PiFM Imaging
A sample that has undergone chemical mechanical polishing (CMP) is imaged via PiFM. While metals…
Visualize Nanoscale Absorption in Perovskite Photovoltaic Film using Vis-PiFM
The chemical analysis of solar cell materials is an excellent application of Vis-PiFM. In a…
Cross-section of a Semiconductor Trench
Vista-IR images a cross-section of a semiconductor trench via PiFM, highlighting two different materials based on their unique IR absorption bands.